Ready for Transfer

Microcalorimeter X-Ray Detectors with X-Ray Lens

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Laboratory: National Institute of Standards and Technology (NIST)

Technology: Microcalorimeter X-Ray Detectors with X-Ray Lens

Opportunity: This innovative NIST technology is available for licensing and collaborative research opportunities.

Details: NIST’s X-ray microcalorimeter determines the chemical composition of a sample based on the energy of X-rays given off as the sample is scanned with a beam of electrons. It offers improved resolution due to the semiconducting detector it uses which undergoes a rapid change in electrical resistance when heated by the absorption of a single X-ray. The x-ray lens is used to increase the effective collection area of the microcalorimeter detector used in an x-ray spectrometer.

Benefits: The X-ray microcalorimeter makes collecting chemical composition easy and can detect a broad range of X-ray energies.

Potential Applications:

  • Semiconductor manufacturing
  • Improved chemical analysis of contaminant particles in semiconductor processing
  • Among others areas.

Contact: For more information on this technology, contact Jack Pevenstein in NIST’s Technology Partnerships Office at nisttech@nist.gov.

To view NIST’s fact sheet on this technology, visit https://tsapps.nist.gov/techtransfer/index.cfm?event=public.techdisplay&ItemID=48.