Automated Scanning Electron Microscope


Security Lab



Laboratory Representative


The ASPEX Personal SEM (PSEM) is a tungsten filament scanning electron microscope optimized for automated particle analysis. The system was designed with staging, scan control and detector geometries optimized for sizing and measuring the composition of particles in the 0.5 micrometer to 100 micrometer range. The PSEM is capable of ~1,000 particles per hour throughput when collecting both size and compositional data and ~10,000 particles per hour when collecting only sizing data. The resulting data sets can be mined for population statistics or needle-in-the-haystack type analyses.

Specifications / Capabilities:

* Imaging:
Down to sub-micron sized features
Secondary Electron Detection
Backscattered Electron Detection (Composition/Topographic modes)
* X-ray Microanalysis:
30 mm2 SDD capable of >20,000 cps on Cu at 1 nA
Standards-based quantification
* Automated Analysis:
0.5 to 100 micrometer particles
Best for Z>12 on carbon substrates
1,000 particles per hour (Composition+Sizing)
10,000 particles per hour (Sizing only)
* Sample types (common):
GSR Prep (sticky carbon on ½" pin mount)
Dispersion on pyrolytic carbon planchet

Scientific Opportunities / Applications:

* Environmental (air/water/surface)
* Industrial Quality Control
* Forensic

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